Micropump for Generation and Control of Vacuum Inside Miniature Devices

The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm 3 volume down to 10...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2014-02, Vol.23 (1), p.50-55
Main Authors: Grzebyk, Tomasz P., Gorecka-Drzazga, Anna, Dziuban, Jan A., Zawada, Aleksander, Konarski, Piotr
Format: Article
Language:English
Subjects:
Anodes
Applied sciences
Cathodes
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Electron and ion emission by liquids and solids
impact phenomena
Electron sources
Emission
Exact sciences and technology
Field-emission electron source
gas ionization
Gettering
Glass
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Ion currents
Ionization
Materials science
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
MEMS
Microcavities
Micromechanical devices
Micromechanical devices and systems
Micropumps
Miniature
miniature pump
Nanoscale materials and structures: fabrication and characterization
Nanotubes
Physics
Precision engineering, watch making
Residual gas
Silicon
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Description
Summary:The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm 3 volume down to 10 -5 hPa. Measurement of ion current allows estimation of vacuum level inside the microcavity.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2013.2288926