Versatility provided by electrostatic torsional microstructure as consequence of its complex dynamics

The results presented show that a simple microstructure involving a plate supported by two tethers can exhibit varied dynamics due to its nonlinearities. The plate vibrates such that the tethers experience a torsional twisting and it is designed within the constraints imposed by the MetalMUMPs proce...

Full description

Saved in:
Bibliographic Details
Published in:Electronics letters 2014-02, Vol.50 (4), p.303-304
Main Authors: Scerri, J, Grech, I, Gatt, E, Casha, O
Format: Article
Language:English
Subjects:
actuation voltages
Applied sciences
complex dynamics
Electric potential
Electronics
electrostatic torsional microstructure
electrostatics
Exact sciences and technology
finite element analysis
finite‐element analysis responses
Fundamental areas of phenomenology (including applications)
Mathematical analysis
Mathematical models
MEMS device
MetalMUMPs process
Micro- and nanoelectromechanical devices (mems/nems)
micromechanical devices
Microstructure
Nonlinear dynamics
nonlinear model
Nonlinearity
numerical simulations
Organic and inorganic circuits and devices
Physics
plate
plates (structures)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Solid dynamics (ballistics, collision, multibody system, stabilization...)
Solid mechanics
Tethers
torsional twisting
vibrations
Voltage
voltage 75 V
Citations: Items that this one cites
Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The results presented show that a simple microstructure involving a plate supported by two tethers can exhibit varied dynamics due to its nonlinearities. The plate vibrates such that the tethers experience a torsional twisting and it is designed within the constraints imposed by the MetalMUMPs process. Each region of operation has different applications and one can traverse through these regions by adjusting the sensing and actuation voltages. As one would expect, the nonlinearities dominate at higher voltages, with the first signs of chaotic trajectories appearing at 75 V. Parameters of the nonlinear model are first determined from finite-element analysis responses, and results from subsequent numerical simulations for each region are presented.
ISSN:0013-5194
1350-911X
1350-911X
DOI:10.1049/el.2013.3758