Electrically Trimmable Phase Change Ge2Sb2Te5 Resistors With Tunable Temperature Coefficient of Resistance

Electrically trimmable resistors have been manufactured using the phase change alloy Ge 2 Sb 2 Te 5 . High resistivity values (about 1 mΩ cm) and almost zero temperature coefficient of resistance (TCR) have been obtained using resistors with hcp phase of metallic behavior and converting a small regi...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on electron devices 2014-08, Vol.61 (8), p.2879-2885
Main Authors: Privitera, Stefania, D'Arrigo, Giuseppe, Mio, Antonio M., Piluso, Nicolo, La Via, Francesco, Rimini, Emanuele
Format: Article
Language:English
Subjects:
Annealing
Conductivity
Crystallization
Electrical resistance measurement
Electrical trimming
high precision
Microelectronics
Resistance
Resistors
temperature coefficient of resistance (TCR)
Temperature measurement
Thermal energy
thin film resistors
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Electrically trimmable resistors have been manufactured using the phase change alloy Ge 2 Sb 2 Te 5 . High resistivity values (about 1 mΩ cm) and almost zero temperature coefficient of resistance (TCR) have been obtained using resistors with hcp phase of metallic behavior and converting a small region of the film into the fcc phase, with opposite trend of resistance versus temperature. The conversion into the fcc phase has been obtained through two electric pulses, the first for melting and quenching in the amorphous phase and the second for crystallization in the fcc semiconductive phase. Theoretical considerations together with the experimental measurements allow to determine the proper ratio between the metallic and the semiconductive phase required to obtain a target resistance and temperature dependence. For example, a resistor almost independent on the temperature can be achieved by electrical trimming, increasing the resistance of about 10% of the initial value. The resistor layout has been optimized through electro-thermal simulations, to achieve the modification of the resistors structure only in a confined region. Experimental results confirm the theoretical expectations and demonstrate that phase change materials can be effectively used to obtain reversible electrically trimmable resistors with adjustable TCR.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2014.2330457