Nitrogen-Doped TiO2 Nanoparticles and Their Composites with Plasma Polymer as Deposited by Atmospheric Pressure DBD

TiO2 nanoparticles and nitrogen‐doped TiO2−xNx nanoparticles dispersed in plasma polymer phase are produced by atmospheric pressure DBD in titanium tetraisopropoxide with dry air, mixture of N2 and O2, and 100% N2 used as carrier gases. Energy supply per monomer molecule (the Yasuda parameter) is fo...

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Bibliographic Details
Published in:Plasma processes and polymers 2014-09, Vol.11 (9), p.864-877
Main Authors: Shelemin, Artem, Choukourov, Andrei, Kousal, Jaroslav, Slavínská, Danka, Biederman, Hynek
Format: Article
Language:English
Subjects:
Atmospheric pressure
DBD
nano-composites
Nanoparticles
Nitrogen
TiO2
titanium tetraisopropoxide
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Summary:TiO2 nanoparticles and nitrogen‐doped TiO2−xNx nanoparticles dispersed in plasma polymer phase are produced by atmospheric pressure DBD in titanium tetraisopropoxide with dry air, mixture of N2 and O2, and 100% N2 used as carrier gases. Energy supply per monomer molecule (the Yasuda parameter) is found to be an important parameter describing the deposition process in N2. In the monomer deficient regime, spherical TiO2 particles are produced with an average size varying from 30 to 80 nm. In the power deficient regime, composite films are deposited consisting of TiO2−xNx nanoparticles embedded in nitrogen‐rich plasma polymer matrix, particulates being larger than 100 nm. Highly porous nanostructured thin films can be produced by atmospheric pressure DBD in N2/titanium tetraisopropoxide, in which nitrogen‐doped TiO2−xNx nanoparticles are embedded into nitrogen‐rich plasma polymer. Inorganic‐to‐plasma polymer ratio can be interchangeably controlled by discharge power and by flow rate of working gas (the Yasuda parameter). In dry air, TiO2 nanoparticles are produced.
ISSN:1612-8850
1612-8869
DOI:10.1002/ppap.201300207