Perfluorocarbon Destruction and Removal Efficiency: Considering the Byproducts and Energy Consumption of an Abatement System for Microelectronics Manufacturing

The purpose of this paper was to estimate the reduction efficiency of an abatement system for perfluorocarbon (PFC) gases produced during semiconductor manufacturing processes. The reduction efficiency currently used in the semiconductor industry, the destruction and removal efficiency (DRE), consid...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2014-11, Vol.27 (4), p.456-461
Main Authors: Ko, Dong Guk, Ko, Seung Jong, Choi, Eun Kyung, Min, Sang Guen, Oh, Sang Hyub, Jung, Jinsang, Kim, Byung Moon, Im, Ik-Tae
Format: Article
Language:English
Subjects:
Byproducts
Destruction
Efficiency
Energy consumption
Estimating
Manufacturing engineering
Manufacturing processes
Mass spectroscopy
Perfluorocarbons
Pollution control
Process control
Reduction
Semiconductors
Spectroscopy
Spectrum analysis
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Summary:The purpose of this paper was to estimate the reduction efficiency of an abatement system for perfluorocarbon (PFC) gases produced during semiconductor manufacturing processes. The reduction efficiency currently used in the semiconductor industry, the destruction and removal efficiency (DRE), considers only the destruction ratio of PFC gases. A method estimating the reduction efficiency, which in addition to measure the destruction ratio also considers the energy consumption and byproducts produced during the treatment of PFC gases, was proposed in this paper; this efficiency was defined as the net reduction efficiency (NRE). For the estimation of the reduction efficiency, measurements were made using a plasma-wet type abatement system installed in an actual semiconductor manufacturing plant. The destruction ratio of the PFC gases was measured using Fourier transform infrared spectroscopy and quadrupole mass spectroscopy. The energy consumption was measured using an electricity meter. Based on these measurements, the DRE and the NRE of the PFC gases were calculated and compared. The results indicated that the DRE showed high reduction efficiency while the NRE showed lower values.
ISSN:0894-6507
1558-2345
DOI:10.1109/TSM.2014.2362942