Frequency Modulation and Device Repaired by Laser Surface Treatment in Film Bulk Acoustic Filters

The study used a two-stage radio frequency magnetron sputtering method to deposit ZnO piezo-electric films. Lasers emitting 1064- and 355-nm wavelengths were used to conduct thermal treat-ment of the ZnO films. The measurement results of X-ray diffraction and scanning electron micros-copy showed tha...

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Bibliographic Details
Published in:Journal of laser micro nanoengineering 2016-02, Vol.11 (1), p.13-16
Main Authors: Cheng, C.C, Lin, R.C, Lin, H.K, Kao, K.S, Chen, Y.C
Format: Article
Language:English
Subjects:
Electric filters
Production processes
Zinc oxide
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Summary:The study used a two-stage radio frequency magnetron sputtering method to deposit ZnO piezo-electric films. Lasers emitting 1064- and 355-nm wavelengths were used to conduct thermal treat-ment of the ZnO films. The measurement results of X-ray diffraction and scanning electron micros-copy showed that ultraviolet lasers (UV) effectively improved the c-axis preferred orientation of ZnO films, facilitating the improvement of the return loss of longitudinal-mode film bulk acoustic resonator (FBAR) devices and their resonance frequency changes. Near-infrared lasers (NIR) ena-bled the growth of ZnO films along the a-axis, resulting in a deterioration of the return loss of longi-tudinal-mode FBAR devices. Finally, UV lasers were used to repair a FBAR filter that failed to modulate frequencies. The filter was modified into a band-pass filter after its frequency response was successfully modulated.
ISSN:1880-0688
1880-0688
DOI:10.2961/jlmn.2016.01.0002