A Stick-Slip Positioning Stage Robust to Load Variations

In stick-slip positioning, friction between the stick-slip surfaces plays a critical role in positioning accuracy. Positioning performance varies when the load to drive changes. In this paper, by using a form-closed cam, the driving unit is separated from the moving unit to eliminate load influence....

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2016-08, Vol.21 (4), p.2165-2173
Main Authors: Wang, Yong, Zhu, Junhui, Pang, Ming, Luo, Jun, Xie, Shaorong, Liu, Mei, Sun, Lining, Zhou, Chao, Tan, Min, Ge, Ji, Sun, Yu, Ru, Changhai
Format: Article
Language:English
Subjects:
Construction
Contact
Design analysis
Dynamic characteristics
Fasteners
Flexible hinges
Force
form-closed cam
Friction
load insensitive
Load management
Mathematical models
Mechatronics
Piezoelectric actuators
precision positioning
Rails
Scanning
stick-slip
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Summary:In stick-slip positioning, friction between the stick-slip surfaces plays a critical role in positioning accuracy. Positioning performance varies when the load to drive changes. In this paper, by using a form-closed cam, the driving unit is separated from the moving unit to eliminate load influence. The stage is capable of operating in either a stepping mode or a scanning mode. Numerical modeling was conducted to analyze the static and dynamic characteristics of the stage design. In experiments, a number of parameters were tested on the constructed stage, and positioning performance was measured via laser-doppler vibrometry. Experimental results demonstrate that in the stepping mode, the stage has a travel range of 2 mm with incremental step sizes ranging from 30 nm to 2.3 μm. In the scanning mode, the stage has a positioning resolution of 1.15 nm. The measured results also confirm that load variations on the stage have little influence on contact friction force and positioning performance.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2016.2517102