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Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension

We introduce a newly developed polymer magnetic composite for use as a high resistivity, high permeability magnetic core to significantly improve the energy consumption of micromachined inductive suspensions. Compared to a similar inductive suspension structure without a core, the electrical current...

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Bibliographic Details
Published in:IEEE magnetics letters 2016, Vol.7, p.1-3
Main Authors: Poletkin, Kirill V., Lu, Zhiqiu, Moazenzadeh, Ali, Mariappan, Saravana Guru, Korvink, Jan G., Wallrabe, Ulrike, Badilita, Vlad
Format: Article
Language:English
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Summary:We introduce a newly developed polymer magnetic composite for use as a high resistivity, high permeability magnetic core to significantly improve the energy consumption of micromachined inductive suspensions. Compared to a similar inductive suspension structure without a core, the electrical current required to obtain a levitation height of 110 μm is 65 mA versus 120 mA. The use of the core brings the operating temperature in ambient air at 27 °C down from 120 °C to 60 °C, the lowest value among all previously reported micromachined inductive suspensions. Beyond this performance improvement, the present contribution demonstrates the feasibility of three-dimensional micromachined inductive suspensions as integrated elements of levitated micromachined systems.
ISSN:1949-307X
1949-3088
DOI:10.1109/LMAG.2016.2612181