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Concepts for an Annular Pole Piece Detector for the Simultaneous Measurement of X-Rays and Backscattered Electrons Inside a SEM

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Bibliographic Details
Published in:	Microscopy and microanalysis 2014-08, Vol.20 (S3), p.1118-1119
Main Authors:	Liebel, A., Eckhardt, R., Bornschlegl, M., Bechteler, A., Niculae, A., Soltau, H.
Format:	Article
Language:	English
Subjects:	Advances in Instrumentation Symposia Vendor Symposium: New Tools for Life and Materials Sciences
Citations:	Items that cite this one
Online Access:	Get full text
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