Simulation and Fabrication of SAW-Based Gas Sensor with Modified Surface State of Active Layer and Electrode Orientation for Enhanced H2 Gas Sensing

• Published in: Journal of electronic materials 2017-02, Vol.46 (2), p.679-686
• Main Authors: Hasan, Md. Nazibul, Maity, Santanu, Sarkar, Argha, Bhunia, Chandan Tilak, Acharjee, Debabrata, Joseph, Aneesh M.
• Format: Article
• Language: English
• Subjects: Characterization and Evaluation of Materials; Chemistry and Materials Science; Electronics and Microelectronics; Gases; Hydrogen; Instrumentation; Materials Science; Nanotechnology; Optical and Electronic Materials; Sensors; Solid State Physics
• ISSN: 0361-5235; 1543-186X
• DOI: 10.1007/s11664-016-5128-7

The design, analysis, optimization, and fabrication of layered and nanostructure-based surface acoustic wave (SAW) gas sensors are presented. A lithium niobate and zinc oxide (ZnO) nano multilayer structure is proposed to enhance the sensitivity of the SAW-based gas sensor. Different materials are considered for the intermediate layer in the design for optimization purposes. The sensitivity of the sensor could be improved due to increased active surface area obtained by varying the aspect ratio of the nanorods, the thickness of the intermediate layer, and the gap between the electrodes. The total displacement and frequency shift of the device were significantly improved. Overall, the mechanically engineered surface-based (nanorod) SAW gas sensor offered better sensing response than the layered SAW gas sensor in terms of sensitivity performance.