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New Algorithm for Modeling the Video Signal of a Scanning Electron Microscope

We present the fundamentals of the physical processes of forming the video signal in a scanning electron microscope. We have produced a new library algorithm for video modeling. Testing of the algorithm has shown its reasonable accuracy, detailed correspondence with video signal simulations of their...

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Bibliographic Details
Published in:Measurement techniques 2016-04, Vol.59 (1), p.93-98
Main Authors: Gagarina, L. G., Nikitin, A. V.
Format: Article
Language:English
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Summary:We present the fundamentals of the physical processes of forming the video signal in a scanning electron microscope. We have produced a new library algorithm for video modeling. Testing of the algorithm has shown its reasonable accuracy, detailed correspondence with video signal simulations of their experimental counterparts. Computation for a model signal of 500 points takes less than 1 second, which is many thousands of times faster than using the Monte Carlo method.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-016-0923-3