An Evaluation of Image Quality Metrics for Scanning Electron Microscopy

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Bibliographic Details
Published in:Microscopy and microanalysis 2016-07, Vol.22 (S3), p.572-573
Main Authors: Zotta, Matthew D., Han, Yukun, Bergkoetter, Matthew D., Lifshin, Eric
Format: Article
Language:English
Subjects:
Advances in Image Processing, Display and Analysis
Analytical and Instrumentation Science Symposia
Electron microscopes
Process controls
Scanning electron microscopy
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927616003718