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Considerations and Challenges with Characterizing Si/SiGe Interfaces

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Bibliographic Details
Published in:Microscopy and microanalysis 2016-07, Vol.22 (S3), p.1450-1451
Main Authors: Dyck, Ondrej, Leonard, Donovan, Poplawsky, Jonathan, Pritchett, Emily, Kiselev, Andrey A., Jackson, Clayton A., Edge, Lisa F.
Format: Article
Language:English
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927616008096