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Considerations and Challenges with Characterizing Si/SiGe Interfaces

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Published in:Microscopy and microanalysis 2016-07, Vol.22 (S3), p.1450-1451
Main Authors: Dyck, Ondrej, Leonard, Donovan, Poplawsky, Jonathan, Pritchett, Emily, Kiselev, Andrey A., Jackson, Clayton A., Edge, Lisa F.
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creator Dyck, Ondrej
Leonard, Donovan
Poplawsky, Jonathan
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doi_str_mv 10.1017/S1431927616008096
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source Cambridge University Press
subjects Combining Simulation, Experiment, and Data Science for Materials Characterization and Design
Interfaces
Microscopy
Physical Science Symposia
title Considerations and Challenges with Characterizing Si/SiGe Interfaces
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