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AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

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Bibliographic Details
Published in:	Microscopy and microanalysis 2015-08, Vol.21 (S3), p.1433-1434
Main Authors:	Lewis, Aaron, Komissar, A., Ignatov, A., Fedoroyov, Oleg, Maayan, E.
Format:	Article
Language:	English
Subjects:	A07 Scanning Probe Microscopy: New Methods and Applications Analytical and Instrumentation Science Symposia Ion beams Scanning electron microscopy
Citations:	Items that cite this one
Online Access:	Get full text
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