Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences

• Published in: Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2017, Vol.11 (1), p.1-19
• Main Authors: Akhsakhalyan, A. D., Kluenkov, E. B., Lopatin, A. Ya, Luchin, V. I., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Toropov, M. N., Tsybin, N. N., Chkhalo, N. I., Shcherbakov, A. V.
• Format: Article
• Language: English
• Subjects: Chemistry and Materials Science; Materials Science; Surfaces and Interfaces; Thin Films; X ray optics
• ISSN: 1027-4510; 1819-7094
• DOI: 10.1134/S1027451017010049

A real opportunity for applying traditional optical methods to soft X-ray and extreme UV (ultraviolet) radiation bands has appeared thanks to recent successes in the area of multilayer-mirror deposition and procedures for fabricating supersmooth and highly precise substrates of mirrors. The implementation of this opportunity opens up fundamentally new prospectss in the nanodiagnostics of substances, micro- and nanoelectronics, microbiology, solar astronomy and other applications. The main directions in multilayer X-ray optics developed at the Institute for the Physics of Microstructures, Russian Academy of Sciences, are presented and the aspects of the use thereof in science and technology are considered. The main problems arising during the fabrication of multilayer interference structures for the soft X-ray and extreme UV bands are discussed. The main results obtained recently in the scope of each direction of investigation are presented. Plans for the future development of these directions are discussed.