Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

• Published in: Pramāṇa 2017-02, Vol.88 (2), p.1-6, Article 33
• Main Authors: VARSHNAY, N K, SINGH, A, BENERJI, N S
• Format: Article
• Language: English
• Subjects: Astronomy; Astrophysics and Astroparticles; Circuits; Electric potential; Electrodes; Energy transfer; Excimer lasers; Excimers; Gas cooling; High voltages; Inductance; Ionization; Laser beams; Laser cooling; Lasers; Observations and Techniques; Physics; Physics and Astronomy; Pulse compression; Time compression; Xenon chloride lasers
• ISSN: 0304-4289; 0973-7111
• DOI: 10.1007/s12043-016-1334-3

Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression suitable for material processing applications are presented here. The laser incorporates in-built compact gas circulation and gas cooling to ensure fresh gas mixture between the electrodes for repetitive operation. A magnetically coupled tangential blower is used for gas circulation inside the laser chamber for repetitive operation. The exciter consists of C–C energy transfer circuit and thyratron is used as a high-voltage main switch with single-stage magnetic pulse compression (MPC) between thyratron and the laser electrodes. Low inductance of the laser head and uniform and intense pre-ionization are the main features of the electric circuit used in the laser. A 250 ns rise time voltage pulse was compressed to 100 ns duration with a single-stage magnetic pulse compressor using Ni–Zn ferrite cores. The laser can generate about 150 mJ at ∼100 Hz rep-rate reliably from a discharge volume of 100 cm 3 . 2D spatial laser beam profile generated is presented here. The profile shows that the laser beam is completely filled with flat-top which is suitable for material processing applications. The SEM image of the microhole generated on copper target is presented here.