Surface modification of ZnO by plasma and laser treatment

Structural and optical properties of zinc oxide thin films deposited on glass substrates were studied before and after plasma and laser treatment. It was shown that the polycrystalline ZnO structure was destroyed by modifying laser radiation, while in the center of the spot amorphous zinc oxide was...

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Bibliographic Details
Published in:Ferroelectrics 2017-02, Vol.508 (1), p.124-129
Main Authors: Afanasjev, V. P., Mukhin, N. V., Redka, D. N., Rudenko, M. V., Terukov, E. I., Oseev, A., Hirsch, S.
Format: Article
Language:English
Subjects:
Glass
laser annealing
Lasers
Light scattering
Morphology
Optical properties
Plasma
plasma treatment
Reduction
surface modification
Thin films
Transformations
transparent conductive oxide
Zinc oxide
Zinc oxides
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Summary:Structural and optical properties of zinc oxide thin films deposited on glass substrates were studied before and after plasma and laser treatment. It was shown that the polycrystalline ZnO structure was destroyed by modifying laser radiation, while in the center of the spot amorphous zinc oxide was formed. Plasma treatment performed a transformation of the surface morphology of ZnO layers without deterioration of their optical and electrical properties. Longer treatment times result in over flattening of the surface followed by observable reduction of light scattering along with degradation of electronic properties.
ISSN:0015-0193
1563-5112
DOI:10.1080/00150193.2017.1289587