Two-photon polymerization fabrication and Raman spectroscopy research of SU-8 photoresist using the femtosecond laser

In this work, a two-photon polymerization（2PP） processing device was built using the femtosecond laser, and femtosecond laser direct writing was performed on SU-8 photoresist. Due to the 2PP effect of the photoresist caused by the femtosecond laser, the polymeric line with size less than the focal s...

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Bibliographic Details
Published in:Optoelectronics letters 2017-05, Vol.13 (3), p.210-213
Main Author: 陈子坚 姚吉 徐庆继 王振华
Format: Article
Language:English
Subjects:
Direct laser writing
Electromagnetic absorption
Lasers
Optical Devices
Optics
Photonics
Photons
Photoresists
Physics
Physics and Astronomy
Polymerization
Polymers
Raman spectra
Raman spectroscopy
SU-8光刻胶
光致抗蚀剂
制备
双光子聚合
拉曼光谱
焦斑尺寸
聚合物
飞秒激光
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Summary:In this work, a two-photon polymerization（2PP） processing device was built using the femtosecond laser, and femtosecond laser direct writing was performed on SU-8 photoresist. Due to the 2PP effect of the photoresist caused by the femtosecond laser, the polymeric line with size less than the focal spot size is obtained. Based on the Raman spectroscopy characterization of SU-8 polymer before and after 2PP, we research the dynamic process of femtosecond laser induced 2PP. In Raman spectra, some scattering peaks with large intensity variation, such as 1 108 cm~（-1） and 1 183 cm~（-1）, indicate that the asymmetric stretching vibration of C-O-C bond in SU-8 polymer is increased. By comparison, we can find that 2PP only affects the light absorption of initiator, but does not affect the monomer polymerization. It is helpful to understand the interaction of photoresist and femtosecond laser, and plays an important role in quantitatively controlling the polymerization degree of SU-8 polymer and improving the processing resolution of 2PP.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-017-7043-4