Experimental Analysis of Repeatability and Calibration Residuals in On-Wafer Non-Contact Probing

We experimentally demonstrate the repeatability performance of non-contact probes for millimeter-wave (mmW) and terahertz (THz)-frequency on-wafer device characterization under typical laboratory settings. Akin to conventional contact probe measurements, the leading contribution to the overall uncer...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2017-06, Vol.65 (6), p.2185-2191
Main Authors: Caglayan, Cosan, Sertel, Kubilay
Format: Article
Language:English
Subjects:
Alignment
Antenna measurements
Calibration
Drift (instrumentation)
Instruments
Measurement uncertainty
millimeter waves (mmWs)
on-wafer characterization
on-wafer measurements
Probes
repeatability
Reproducibility
Simulation
sub-mmWs
terahertz (THz)
Uncertainty
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Summary:We experimentally demonstrate the repeatability performance of non-contact probes for millimeter-wave (mmW) and terahertz (THz)-frequency on-wafer device characterization under typical laboratory settings. Akin to conventional contact probe measurements, the leading contribution to the overall uncertainty of non-contact measurements in mmW and THz bands is due to mechanical alignment repeatability that cannot be removed through on-wafer calibration. Nevertheless, measurement uncertainty for non-contact probes studied here through one-port and two-port measurements conducted in 140-750 GHz bands demonstrate excellent S-parameter measurement repeatability, as predicted by full-wave simulations, and is limited only by instrumentation drift.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2017.2649498