Implementation of Ba0.6Sr0.4TiO3‐ZnO‐B2O3 based tunable microwave phase shifters in LTCC technology

Tunable dielectric Ba0.6Sr0.4TiO3‐ZnO‐B2O3 thick‐films were analyzed regarding their integration potential into the LTCC technology. Therefore, tunable loaded line phase shifters based on metal‐insulator‐metal varactors with single‐ and double‐printed BST thick‐films were fabricated and co‐sintered...

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Published in:International journal of applied ceramic technology 2017-07, Vol.14 (4), p.574-582
Main Authors: Kohler, Christian, Nikfalazar, Mohammad, Heunisch, Andreas, Schulz, Bärbel, Mikolajek, Morten, Rabe, Torsten, Jakoby, Rolf, Binder, Joachim R.
Format: Article
Language:English
Subjects:
Adhesion
Aluminum oxide
Cobalt
dielectric materials/properties
Dielectrics
electroceramics
Insulators
low temperature
Phase shifters
Silver
Sintering
Substrates
Thick films
Varactor diodes
Zinc oxide
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container_end_page 582
container_issue 4
container_start_page 574
container_title International journal of applied ceramic technology
container_volume 14
creator Kohler, Christian
Nikfalazar, Mohammad
Heunisch, Andreas
Schulz, Bärbel
Mikolajek, Morten
Rabe, Torsten
Jakoby, Rolf
Binder, Joachim R.
description Tunable dielectric Ba0.6Sr0.4TiO3‐ZnO‐B2O3 thick‐films were analyzed regarding their integration potential into the LTCC technology. Therefore, tunable loaded line phase shifters based on metal‐insulator‐metal varactors with single‐ and double‐printed BST thick‐films were fabricated and co‐sintered inside a four layer LTCC module. Microstructural and chemical investigations showed a sufficient compatibility and adhesion between the silver, BST composite and LTCC layers and a resulting morphology depending on the processing route. The microwave characterization of the LTCC‐embedded phase shifters revealed comparable results to phase shifters with the same design on alumina substrates.
doi_str_mv 10.1111/ijac.12687
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subjects Adhesion
Aluminum oxide
Cobalt
dielectric materials/properties
Dielectrics
electroceramics
Insulators
low temperature
Phase shifters
Silver
Sintering
Substrates
Thick films
Varactor diodes
Zinc oxide
title Implementation of Ba0.6Sr0.4TiO3‐ZnO‐B2O3 based tunable microwave phase shifters in LTCC technology
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