Calibration of Scanning Electron Microscopes over a Wide Range of Magnifications

A new method is proposed for calibrating scanning electron microscopes (SEM) with magnification in the 10–50000 × range using an end gauge and an auxiliary structure. Use of a certified end gauge ensures traceability of the calibration results to the primary standard for the meter. The relative expa...

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Bibliographic Details
Published in:Measurement techniques 2017-03, Vol.59 (12), p.1245-1249
Main Authors: Kirtaev, R. V., Kuzin, A. Yu, Maslov, V. G., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N.
Format: Article
Language:English
Subjects:
Analytical Chemistry
Calibration
Characterization and Evaluation of Materials
Electron microscopes
Measurement Science and Instrumentation
Measurement techniques
Microscopes
Physical Chemistry
Physics
Physics and Astronomy
Scanning electron microscopy
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Summary:A new method is proposed for calibrating scanning electron microscopes (SEM) with magnification in the 10–50000 × range using an end gauge and an auxiliary structure. Use of a certified end gauge ensures traceability of the calibration results to the primary standard for the meter. The relative expanded uncertainty of measurements on an S-4800 SEM at magnifications of 1000, 10000, and 50000 × is less than 0.14%.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-017-1123-5