Choosing the ranges for measuring the reflectivity of a prism coupler in the waveguide spectroscopy of thin films

A criterion for selecting the best ranges for measuring the reflectivity of a prism coupler, based on minimizing the error in reconstructing the parameters of thin films using the least-square method, is proposed. The effectiveness of the criterion is demonstrated by solving the inverse optical prob...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2016-04, Vol.80 (4), p.421-425
Main Authors: Sotsky, A. B., Steingart, L. M., Parashkov, S. O., Sotskaya, L. I.
Format: Article
Language:English
Subjects:
Criteria
Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XI Conference “Lasers and Laser Information Technologies: Fundamental Problems and Applications”
Reflectance
Silicon substrates
Spectroscopic analysis
Thin films
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Summary:A criterion for selecting the best ranges for measuring the reflectivity of a prism coupler, based on minimizing the error in reconstructing the parameters of thin films using the least-square method, is proposed. The effectiveness of the criterion is demonstrated by solving the inverse optical problem for a SiO x film deposited on a silicon substrate as an example.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873816040304