Optimizing annular semiconductor detectors of back scattered electrons in SEM

Characteristics of a various annular detectors of back scattered electrons (BSEs) in scanning electron microscopes (SEMs) are analyzed. Modified configurations of detectors that substantially improve their efficiency are proposed (e.g., using rings with variable width and arranged perpendicular to t...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2014-09, Vol.78 (9), p.839-845
Main Authors: Zaitsev, S. V., Kupreenko, S. Yu, Luk’yanov, A. E., Rau, E. I.
Format: Article
Language:English
Subjects:
Hadrons
Heavy Ions
Microscopes
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XVIII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Used in Solid-State Physics SEM-2013
Scanning electron microscopy
Semiconductor charged particle detectors
Sensors
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Summary:Characteristics of a various annular detectors of back scattered electrons (BSEs) in scanning electron microscopes (SEMs) are analyzed. Modified configurations of detectors that substantially improve their efficiency are proposed (e.g., using rings with variable width and arranged perpendicular to the incident flux of BSEs).
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873814090330