Analysis of formulas for calculating the main characteristics of backscattered electrons and how they compare to experimental results

Semiempirical relations for the following basic parameters of backscattered electrons in a scanning electron microscope are derived: reflection coefficient; average and most probable energies; energy spectra; and energy of backscattered electrons, depending on the angle of exit. The energy dependenc...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2013-08, Vol.77 (8), p.951-958
Main Authors: Rau, E. I., Ditsman, S. A., Zaitsev, S. V., Lermontov, N. V., Luk’yanov, A. E., Kupreenko, S. Yu
Format: Article
Language:English
Subjects:
Backscattering
Electrons
Energy spectra
Hadrons
Heavy Ions
Mathematical analysis
Microscopes
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XXIV Russian Conference on Electron Microscopy (SEM-2012)
Reflectance
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Summary:Semiempirical relations for the following basic parameters of backscattered electrons in a scanning electron microscope are derived: reflection coefficient; average and most probable energies; energy spectra; and energy of backscattered electrons, depending on the angle of exit. The energy dependence is shown to have a maximum in the angular region of backscattered electrons Θ = 65°–75°.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873813080364