Automating the mode of the electron-probe control of templates for imprint lithography

Problems of selecting the optimum parameters of electron-probe systems when scanning areas on the order of 1 cm 2 with resolutions of 3–20 nm and the real-time control of these parameters during scanning are considered. The obtained dependences open the possibility of solving certain problems in ful...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2012-09, Vol.76 (9), p.965-969
Main Authors: Kazmiruk, V. V., Savitskaya, T. N.
Format: Article
Language:English
Subjects:
Automation
Hadrons
Heavy Ions
Lithography
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
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Summary:Problems of selecting the optimum parameters of electron-probe systems when scanning areas on the order of 1 cm 2 with resolutions of 3–20 nm and the real-time control of these parameters during scanning are considered. The obtained dependences open the possibility of solving certain problems in fully automating the acquisition of information.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873812090080