Applying invariant embedding methods to the theory of thin film sputtering by light-ion bombardment

An analytical solution to the problem of energy spectra of sputtered atoms under light-ion bombardment of plane-parallel layer is obtained. The proposed theory is based on the invariant embedding principle applied in combination with the discrete flow method. This approach provides absolutely precis...

Full description

Saved in:
Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2010-02, Vol.74 (2), p.233-240
Main Authors: Manukhin, V. V., Barat, A. A., Gubkin, M. K.
Format: Article
Language:English
Subjects:
Boundary conditions
Energy spectra
Hadrons
Heavy Ions
Invariants
Ion bombardment
Ions
Nuclear Physics
Nuclear weapons
Physics
Physics and Astronomy
Sputtering
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:An analytical solution to the problem of energy spectra of sputtered atoms under light-ion bombardment of plane-parallel layer is obtained. The proposed theory is based on the invariant embedding principle applied in combination with the discrete flow method. This approach provides absolutely precise fulfillment of the boundary conditions of the Boltzmann kinetic equation. In addition, both reverse sputtering and strike sputtering can be described. The proposed method of solving plane-parallel layer problems makes it possible to approach the study of sputtering spectra of multilayer structures. In addition, a number of features peculiar to light-ion sputtering only can be considered.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873810020280