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Peculiarities of nanostructured silicon carbide films and coatings obtained by novel technique
A new method has been developed for obtaining various versions of nanostructured SiC films and coatings, whose structure can be altered in a controlled way for different applications. The films and coatings obtained can be useful in metallurgy, nuclear power industry, microelectronics, and high-temp...
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Published in: | Bulletin of the Russian Academy of Sciences. Physics 2009-10, Vol.73 (10), p.1374-1376 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A new method has been developed for obtaining various versions of nanostructured SiC films and coatings, whose structure can be altered in a controlled way for different applications. The films and coatings obtained can be useful in metallurgy, nuclear power industry, microelectronics, and high-temperature furnaces. |
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ISSN: | 1062-8738 1934-9432 |
DOI: | 10.3103/S1062873809100153 |