Summary of ISO/TC 201 standard: ISO 19668—Surface chemical analysis—X‐ray photoelectron spectroscopy—Estimating and reporting detection limits for elements in homogeneous materials

This International Standard specifies a procedure by which elemental detection limits in X‐ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable...

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Bibliographic Details
Published in:Surface and interface analysis 2018-01, Vol.50 (1), p.87-89
Main Authors: Shard, A. G., Clifford, C. A.
Format: Article
Language:English
Subjects:
Chemical analysis
detectability
detection limits
Ions
peak area
Spectrum analysis
uncertainty
X ray photoelectron spectroscopy
X-rays
XPS
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Description
Summary:This International Standard specifies a procedure by which elemental detection limits in X‐ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.6339