Advanced analysis of copper X‐ray photoelectron spectra

Chemical state X‐ray photoelectron spectroscopic analysis of copper species is challenging because of the complexity of the 2p spectra resulting from shake‐up structures for Cu(II) species and overlapping binding energies for Cu metal and Cu(I) species. This paper builds upon and extends previously...

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Bibliographic Details
Published in:Surface and interface analysis 2017-12, Vol.49 (13), p.1325-1334
Main Author: Biesinger, Mark C.
Format: Article
Language:English
Subjects:
Auger
Augers
Copper
Curve fitting
Data analysis
Mathematical analysis
Oxidation
oxides
peak‐fitting
Spectra
Spectrum analysis
Thickness measurement
Valence
Wagner plot
X ray photoelectron spectroscopy
XPS
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Summary:Chemical state X‐ray photoelectron spectroscopic analysis of copper species is challenging because of the complexity of the 2p spectra resulting from shake‐up structures for Cu(II) species and overlapping binding energies for Cu metal and Cu(I) species. This paper builds upon and extends previously published X‐ray photoelectron spectroscopy curve‐fitting and data analysis procedures for a wide range of copper containing species. Steps undertaken include the following: (i) an examination of existing Cu 2p3/2 main peak and Cu 2p3/2 – Cu L3M4,5M4,5 Auger parameter literature data, (ii) analysis of a series of quality standard samples, (iii) curve‐fitting procedures for both the Cu 2p3/2 and the Cu L3M4,5M4,5 spectra (as well as associated anions), (iv) calculations that determine the amount of Cu(II) species in a mixed oxidation state system, (v) calculations and necessary data for thin film mixed oxide/hydroxide thickness measurements, and (vi) a presentation of literature and standard sample values in a Wagner (chemical state) plot. Copyright © 2017 John Wiley & Sons, Ltd.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.6239