Usage of electron back scattering diffraction for investigation of buried damage layer underneath a single crystalline diamond surface

Electron back scattering diffraction was applied as attempt of control of buried damage layer under the single-crystalline diamond surface. A number of approaches for diamond polishing were developed, and clear anisotropy of wear rate for the (100), (110) and (111) planes was observed. Several cryst...

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Published in:Journal of materials science. Materials in electronics 2017-09, Vol.28 (18), p.13464-13471
Main Authors: Sorokin, B. P., Bormashov, V. S., Korostilev, E. V., Novoselov, A. S., Doronin, M. A., Kravchuk, K. S., Blank, V. D.
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Chemistry and Materials Science
Crystal structure
Crystallinity
Diamond polishing
Diamonds
Electron backscatter diffraction
Electrons
Materials Science
Optical and Electronic Materials
Planes
Scattering
Single crystals
Wear rate
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cited_by cdi_FETCH-LOGICAL-c316t-b4826475090f34f6ec0115668d0ada54f4b3beba939f33d66b9e1b00775b3b733
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container_end_page 13471
container_issue 18
container_start_page 13464
container_title Journal of materials science. Materials in electronics
container_volume 28
creator Sorokin, B. P.
Bormashov, V. S.
Korostilev, E. V.
Novoselov, A. S.
Doronin, M. A.
Kravchuk, K. S.
Blank, V. D.
description Electron back scattering diffraction was applied as attempt of control of buried damage layer under the single-crystalline diamond surface. A number of approaches for diamond polishing were developed, and clear anisotropy of wear rate for the (100), (110) and (111) planes was observed. Several crystalline orientations of synthetic and natural diamonds were investigated, and no difference of EBSD patterns between the treated and natural facets was found. A modeling experiment on the fast electron penetration into diamond was fulfilled. Since the EBSD patterns were observed at lowest energies from 2 keV, the escape depth for backscattered electrons and BDL depth could be estimated as ~10–15 nm which could be compared with a few interplanar spacings only.
doi_str_mv 10.1007/s10854-017-7185-y
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subjects Characterization and Evaluation of Materials
Chemistry and Materials Science
Crystal structure
Crystallinity
Diamond polishing
Diamonds
Electron backscatter diffraction
Electrons
Materials Science
Optical and Electronic Materials
Planes
Scattering
Single crystals
Wear rate
title Usage of electron back scattering diffraction for investigation of buried damage layer underneath a single crystalline diamond surface
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