Fabrication of diamond microlens arrays for monolithic imaging homogenizer

Compact microlens arrays (MLAs) have been fabricated on diamond substrates using thermal reflow and dry etching techniques for laser beam homogenization. Firstly, close-packed hexagonal photoresist pillars developed by photolithography were reflowed upon heat plate to form MLAs mask on one side of d...

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Bibliographic Details
Published in:Diamond and related materials 2017-11, Vol.80, p.54-58
Main Authors: Zhu, Tian-Fei, Fu, Jiao, Lin, Fang, Zhang, Minghui, Wang, Wei, Wen, Feng, Zhang, Xiaofan, Bu, Renan, Zhang, Jingwen, Zhu, Jingping, Wang, Jingjing, Wang, Hong-Xing, Hou, Xun
Format: Article
Language:English
Subjects:
Arrays
Beam shaping
Diamonds
Homogenization
Homogenizer
Homogenizers
Imaging
Inductively coupled plasma
Laser beams
Laser etching
Microlens arrays
Photolithography
Plasma etching
Single crystal diamond
Studies
Substrates
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Summary:Compact microlens arrays (MLAs) have been fabricated on diamond substrates using thermal reflow and dry etching techniques for laser beam homogenization. Firstly, close-packed hexagonal photoresist pillars developed by photolithography were reflowed upon heat plate to form MLAs mask on one side of diamond substrate. Secondly, the mask pattern was transferred into substrate with inductively coupled plasma etching to form closely arranged diamond MLAs. Then, the same processes were utilized to fabricate MLAs on the other side of diamond substrate. The MLAs on both sides of substrate are aligned. Thirdly, the obtained diamond MLAs demonstrate compact arrangement, well-uniformity, and good imaging performance with projection experiment. Eventually, the double-sides MLAs-patterned diamond substrate was utilized as monolithic imaging homogenizer, exhibiting a good homogenizing performance. [Display omitted] •Compact and uniform arranged diamond microlens arrays have been fabricated with combination of reflow and ICP techniques.•Monolithic imaging homogenizer is achieved using double-side microlens arrays patterned diamond substrate.•The monolithic diamond imaging homogenizer exhibits a good homogenizing performance in homogenization experiment system.
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2017.09.017