Fabrication of single crystal diamond microchannels for micro-electromechanical systems

Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was g...

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Bibliographic Details
Published in:Diamond and related materials 2017-11, Vol.80, p.64-68
Main Authors: Fu, J., Zhu, T.F., Zhang, M.H., Zhang, X., Li, F.N., Liu, Z.C., Denu, G.A., Wang, Y.F., Zhao, D., Shao, G.Q., Chang, X.H., Wang, W., Zhang, J.W., Wang, H.X., Wang, J.J., Hou, X.
Format: Article
Language:English
Subjects:
Atomic force microscopy
Chemical vapor deposition
Crystal growth
Diamond films
Diamonds
Epitaxial growth
Magnetron sputtering
MEMS
Microchannel
Microchannels
Microelectromechanical systems
Photolithography
Scanning electron microscopy
Single crystal diamond
Single crystals
Studies
Substrates
Tungsten
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Summary:Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology. [Display omitted] •We have fabricated a single crystal diamond microchannels.•The hollow of microchannels were confirmed by colored liquid flow continuity.•This work provide potential method for fabricating single crystal diamond microchannels with any pattern.
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2017.09.016