Simulation of Translational Vibrations Effect on Torque-to-Balance RR-Type MEMS Gyroscope

A mathematical model of torque-to-balance MEMS gyroscope with a drive mode in plane is developed. The model considers compensational control loop, proof-mass dynamics, electromechanical nonlinear effects in capacitive transducers and the inequality of their parameters. The response of the resulting...

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Bibliographic Details
Published in:Gyroscopy and navigation (Online) 2018, Vol.9 (1), p.50-56
Main Authors: Baranova, E. A., Evstifeev, M. I., Eliseev, D. P.
Format: Article
Language:English
Subjects:
Aerospace Technology and Astronautics
Computer simulation
Dynamics
Engineering
Geophysics/Geodesy
Microelectromechanical systems
Qualitative analysis
Simulation
Torque
Transducers
Vibration
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Summary:A mathematical model of torque-to-balance MEMS gyroscope with a drive mode in plane is developed. The model considers compensational control loop, proof-mass dynamics, electromechanical nonlinear effects in capacitive transducers and the inequality of their parameters. The response of the resulting system to translational vibrations is investigated. Qualitative coincidence of simulation results with experimental data is obtained. A way of increasing vibration reliability is highlighted.
ISSN:2075-1087
2075-1109
DOI:10.1134/S2075108718010029