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Atomic Layer Deposition of Aluminum Nitride Using Tris(diethylamido)aluminum and Hydrazine or Ammonia
Aluminum nitride (AlN x ) films were obtained by atomic layer deposition (ALD) using tris(diethylamido) aluminum(III) (TDEAA) and hydrazine (N 2 H 4 ) or ammonia (NH 3 ). The quartz crystal microbalance (QCM) data showed that the surface reactions of TDEAA and N2H4 (or NH 3 ) at temperatures from 15...
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Published in: | Russian microelectronics 2018-03, Vol.47 (2), p.118-130 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Aluminum nitride (AlN
x
) films were obtained by atomic layer deposition (ALD) using tris(diethylamido) aluminum(III) (TDEAA) and hydrazine (N
2
H
4
) or ammonia (NH
3
). The quartz crystal microbalance (QCM) data showed that the surface reactions of TDEAA and N2H4 (or NH
3
) at temperatures from 150 to 225°C were self-limiting. The rates of deposition of the nitride film at 200°C for systems with N
2
H
4
and NH
3
coincided: ~1.1 Å/cycle. The ALD AlN films obtained at 200°C using hydrazine had higher density (2.36 g/cm
3
, 72.4% of bulk density) than those obtained with ammonia (2.22 g/cm
3
, 68%). The elemental analysis of the film deposited using TDEAA/N2H4 at 200°C showed the presence of carbon (~1.4 at %), oxygen (~3.2 at %), and hydrogen (22.6 at %) impurities. The N/Al atomic concentration ratio was ~1.3. The residual impurity content in the case of N
2
H
4
was lower than for NH
3
. In general, it was confirmed that hydrazine has a more preferable surface thermochemistry than ammonia. |
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ISSN: | 1063-7397 1608-3415 |
DOI: | 10.1134/S1063739718020026 |