Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor

SUMMARY In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate b...

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Bibliographic Details
Published in:Electrical engineering in Japan 2018-07, Vol.204 (2), p.44-49
Main Authors: ARAKI, RYOMA, ABE, TAKASHI, NOMA, HARUO, SOHGAWA, MASAYUKI
Format: Article
Language:English
Subjects:
Change detection
contact and slipping
detecting of proximity
gripping control
Manipulators
Microelectromechanical systems
Polydimethylsiloxane
Proximity
proximity sensor
Robot arms
Sensors
Silicon substrates
Silicone resins
Strain gauges
tactile sensor
Tactile sensors (robotics)
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Summary:SUMMARY In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.
ISSN:0424-7760
1520-6416
DOI:10.1002/eej.23098