A CVD Process for Producing Atomic Current Sources Based on 63Ni

A CVD process was developed for producing 63 Ni-based atomic batteries by deposition of active 63 Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63 Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support...

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Bibliographic Details
Published in:Radiochemistry (New York, N.Y.) N.Y.), 2018, Vol.60 (2), p.158-163
Main Authors: Kharitonov, I. D., Mazgunova, V. A., Babain, V. A., Kostylev, A. I., Merkushkin, A. O., Shemukhin, A. A., Balakshin, Yu. V., Kozhemyako, A. V., Kalmykov, S. N., Magomedbekov, E. P.
Format: Article
Language:English
Subjects:
Chemical vapor deposition
Chemistry
Chemistry and Materials Science
Chemistry/Food Science
Current sources
Nuclear Chemistry
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Summary:A CVD process was developed for producing 63 Ni-based atomic batteries by deposition of active 63 Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63 Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support temperature and working pressure on the characteristics of the 63 Ni coating was examined.
ISSN:1066-3622
1608-3288
DOI:10.1134/S1066362218020054