Mechanistic study of borosilicate glass growth by low-pressure chemical vapor depostion from tetraethylorthosilicate and trimethylborate

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Bibliographic Details
Published in:Journal of electronic materials 2000-11, Vol.29 (11), p.1312
Main Authors: Hansen, D M, Charters, D, Au, Y L, Mak, W K
Format: Article
Language:English
Online Access:Get full text
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ISSN:0361-5235
1543-186X