Enhanced diffusion and improved device performance using dual spectral source rapid thermal processing

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Bibliographic Details
Published in:Journal of electronic materials 1997-12, Vol.26 (12), p.1422-1427
Main Authors: SINGH, R, CHERUKURI, K. C, VEDULA, L, ROHATGI, A, MEJIA, J, NARAYANAN, S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-997-0061-4