Al-Ga-In-Nitride heterostructures: MOVPE growth in production reactors and characterization

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Bibliographic Details
Published in:Journal of electronic materials 1997-10, Vol.26 (10), p.1123-1126
Main Authors: Beccard, R., Schoen, O., Wachtendorf, B., Schhmitz, D., Juergensen, H., Woelk, E.
Format: Article
Language:English
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ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-997-0006-y