Complex Refractive Indices of Cd^sub x^Zn^sub 1-x^O Thin Films Grown by Molecular Beam Epitaxy

The complex refractive indices of Cd^sub x^Zn^sub 1-x^O thin films were determined by transmission spectrophotometry. Transmission spectra were modeled from 375 nm to 800 nm for samples having cadmium concentrations ranging from 2% to 77%. The transparent and absorptive regimes were fitted separatel...

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Bibliographic Details
Published in:Journal of electronic materials 2008-11, Vol.37 (11), p.1665
Main Authors: Mares, J W, Falanga, M, Folks, W R, Boreman, G, Osinsky, A, Hertog, B, Xie, J Q, Schoenfeld, W V
Format: Article
Language:English
Subjects:
Cadmium
Molecular beam epitaxy
Semiconductors
Spectrum analysis
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Summary:The complex refractive indices of Cd^sub x^Zn^sub 1-x^O thin films were determined by transmission spectrophotometry. Transmission spectra were modeled from 375 nm to 800 nm for samples having cadmium concentrations ranging from 2% to 77%. The transparent and absorptive regimes were fitted separately by Sellmeier and Forouhi-Bloomer models, respectively. Real refractive indices of Cd^sub x^Zn^sub 1-x^O shift to higher values in the transparent region and the optical absorption edge shifts to longer wavelengths with increasing cadmium concentration. Spectroscopic ellipsometry was carried out on one sample from λ = 190 nm to 1.8 µm. Comparison between the two methods shows that the results are in general agreement. [PUBLICATION ABSTRACT]
ISSN:0361-5235
1543-186X