Characterization of InGaAs/GaAs(001) films grown by metalorganic vapor phase epitaxy using alternative sources

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Bibliographic Details
Published in:Journal of electronic materials 1998-02, Vol.27 (2), p.81-84
Main Authors: HAN, B.-K, LI, L, KAPPERS, M. J, HICKS, R. F, YOON, H, GOORSKY, M. S, HIGA, K. T
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Vapor phase epitaxy
growth from vapor phase
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ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-998-0193-1