A Thin-Film Platform for Chemical Gas Sensors

In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high...

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Bibliographic Details
Published in:Russian microelectronics 2018, Vol.47 (4), p.226-233
Main Authors: Roslyakov, I. V., Napolskii, K. S., Stolyarov, V. S., Karpov, E. E., Ivashev, A. V., Surtaev, V. N.
Format: Article
Language:English
Subjects:
Anodizing
Chemical sensors
Electrical Engineering
Engineering
Gas sensors
High resistance
Impact loads
Impact resistance
Load resistance
Magnetron sputtering
Manufacturability
Organic chemistry
Oxidation
Photolithography
Power consumption
Product design
Response time
Thin films
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Summary:In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739718040078