ZnO nanoneedles grown on chip for selective NO2 detection indoors

•A ZnO nanoneedle growth method has been developed from sputtered films of Zn and a growth mechanism is proposed.•The method has been also employed for ZnO nanoneedles in-situ growth on 500 chips simultaneously.•A high selectivity to NO2 is shown with a limit of detection down to 0.08ppm. A conducto...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2018-02, Vol.255, p.1244-1253
Main Authors: Gonzalez-Chavarri, Jurgi, Parellada-Monreal, Laura, Castro-Hurtado, Irene, Castaño, Enrique, Mandayo, Gemma G.
Format: Article
Language:English
Subjects:
Aluminum oxide
Benzene
Formaldehyde
Gas detectors
Gas sensor
Growth mechanism
Nanoneedle
Nanostructure
Nanostructured materials
Nitrogen dioxide
NO2
Pollutants
Sensors
Substrates
Wurtzite
Zinc oxide
Zinc oxides
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Summary:•A ZnO nanoneedle growth method has been developed from sputtered films of Zn and a growth mechanism is proposed.•The method has been also employed for ZnO nanoneedles in-situ growth on 500 chips simultaneously.•A high selectivity to NO2 is shown with a limit of detection down to 0.08ppm. A conductometric sensor based on ZnO nanoneedles for the detection of NO2 is described. The material is grown on chip over Pt interdigitated electrodes patterned on alumina substrates without the need of a catalyst layer. The nanostructure growth relies on two different mechanisms (Vapor-Solid and Liquid-Solid) so nanoneedles with few μm of length and wurtzite structure are obtained. The procedure is optimized on chip, which supposes a significant advantage in the fabrication of nanostructures on sensing devices. The sensor response has been measured under a target gas (NO2) and two interfering pollutants (benzene and formaldehyde). Lower working temperatures than other pure ZnO nanostructures found in the literature have been achieved and limit of detection (LOD) in the order of ppb has been reached. The significant higher response to NO2 with respect to benzene and formaldehyde makes this sensing device suitable for selective NO2 detection indoors.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2017.08.094