MultiSIMNRA: a computational tool for self-consistent ion beam analysis using SIMNRA

SIMNRA is widely adopted by the scientific community of ion beam analysis for interpretation of nuclear scattering analysis. Taking advantage of its recognized reliability and quality of the simulations, we developed a computer program that use parallel sessions of SIMNRA to perform self-consistent...

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Bibliographic Details
Published in:arXiv.org 2018-03
Main Authors: Silva, Tiago F, Mayer, Matej, Rodrigues, Cleber L, Moro, Marcos V, Trindade, Gustavo F, Aguirre, Fernando R, Added, Nemitala, Rizzutto, Márcia A, Tabacniks, Manfredo H
Format: Article
Language:English
Subjects:
Analytical techniques
Computer simulation
Energy spectra
Feasibility studies
Ion beams
Magnetron sputtering
Nuclear scattering
Reliability analysis
Software
Thin films
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Summary:SIMNRA is widely adopted by the scientific community of ion beam analysis for interpretation of nuclear scattering analysis. Taking advantage of its recognized reliability and quality of the simulations, we developed a computer program that use parallel sessions of SIMNRA to perform self-consistent analysis for energy spectra of a given sample obtained using different techniques or experimental setups. In this paper, we present a result using MultiSIMNRA on self-consistent analysis for a multielemental thin film produced by magnetron sputtering. The results demonstrate the potentialities of the self-consistent analysis and its feasibility when using MultiSIMNRA.
ISSN:2331-8422
DOI:10.48550/arxiv.1803.01946