Advanced Fabrication of Single-crystal Diamond Membranes for Quantum Technologies

Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membrane...

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Bibliographic Details
Published in:arXiv.org 2018-03
Main Authors: Challier, Michel, Sonusen, Selda, Barfuss, Arne, Rohner, Dominik, Riedel, Daniel, Koelbl, Johannes, Ganzhorn, Marc, Appel, Patrick, Maletinsky, Patrick, Neu, Elke
Format: Article
Language:English
Subjects:
Argon
Chlorine
Color centers
Crystals
Diamonds
Ion etching
Membranes
Micrometers
Photonics
Reactive ion etching
Single crystals
Thickness
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Summary:Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 \(\mu\)m) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF\(_6\). We thus avoid using toxic, corrosive feed gases and add an alternative to previously presented recipes involving chlorine-based etching steps. Our membranes are smooth (RMS roughness
ISSN:2331-8422