Electron neutral collision frequency measurement with the hairpin resonator probe

Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two w...

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Bibliographic Details
Published in:arXiv.org 2017-03
Main Authors: Peterson, David J, Kraus, Philip, Thai Cheng Chua, Larson, Lynda, Shannon, Steven C
Format: Article
Language:English
Subjects:
Frequency measurement
Gas mixtures
Helium
Parallel plates
Resonators
Sheaths
Transmission lines
Online Access:Get full text
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Summary:Electron neutral collision frequency is measured using both grounded and floating hairpin resonator probes in a 27 MHz parallel plate capacitively coupled plasma (CCP). Operating conditions are 0.1-2 Torr (13.3-267 Pa) in Ar, He, and Ar-He gas mixtures. The method treats the hairpin probe as a two wire transmission line immersed in a dielectric medium. A minimization method is applied during the pressure and sheath correction process by sweeping over assumed collision frequencies in order to obtain the measured collision frequency. Results are compared to hybrid plasma equipment module (HPEM) simulations and show good agreement.
ISSN:2331-8422
DOI:10.48550/arxiv.1703.09334