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Solid-state neutron detectors based on thickness scalable hexagonal boron nitride
This paper reports on the device processing and characterization of hexagonal boron nitride (hBN) based solid-state thermal neutron detectors, where hBN thickness varied from 2.5 to 15 microns. These natural hBN epilayers (with 19.9% B-10) were grown by a low pressure chemical vapor deposition proce...
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Published in: | arXiv.org 2016-10 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | This paper reports on the device processing and characterization of hexagonal boron nitride (hBN) based solid-state thermal neutron detectors, where hBN thickness varied from 2.5 to 15 microns. These natural hBN epilayers (with 19.9% B-10) were grown by a low pressure chemical vapor deposition process. Complete dry processing was adopted for the fabrication of these metal-semiconductor-metal (MSM) configuration detectors. These detectors showed intrinsic thermal neutron detection efficiency values of 0.86%, 2.4%, 3.15%, and 4.71% for natural hBN thickness values of 2.5, 7.5, 10, and 15 microns, respectively. Measured efficiencies are very close (more than 92%) to the theoretical maximum efficiencies for corresponding hBN thickness values for these detectors. This clearly shows the hBN thickness scalability of these detectors. A 15-micron thick hBN based MSM detector is expected to yield an efficiency of 21.4%, if enriched hBN (with ~100% B-10) is used instead of natural hBN. These results demonstrate that the fabrication of hBN thickness scalable highly efficient thermal neutron detectors is possible. |
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ISSN: | 2331-8422 |
DOI: | 10.48550/arxiv.1610.03053 |