Nested Trampoline Resonators for Optomechanics

Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low pressure chemical vapor deposition (LPCVD) Si\(_3\)N\(_4\) wi...

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Bibliographic Details
Published in:arXiv.org 2016-01
Main Authors: Weaver, Matthew J, Pepper, Brian, Luna, Fernando, Buters, Frank M, Eerkens, Hedwig J, Welker, Gesa, Perock, Blaise, Kier Heeck, de Man, Sven, Bouwmeester, Dirk
Format: Article
Language:English
Subjects:
Chemical vapor deposition
Low pressure
Opto-mechanics
Organic chemistry
Resonators
Online Access:Get full text
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Summary:Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low pressure chemical vapor deposition (LPCVD) Si\(_3\)N\(_4\) with a distributed bragg reflector (DBR) mirror. We design a nested double resonator structure with 80 dB of mechanical isolation from the mounting surface at the inner resonator frequency, and we demonstrate up to 45 dB of isolation at lower frequencies in agreement with the design. We reliably fabricate devices with mechanical quality factors of around 400,000 at room temperature. In addition these devices were used to form optical cavities with finesse up to 181,000 \(\pm\) 1,000. These promising parameters will enable experiments in the quantum regime with macroscopic mechanical resonators.
ISSN:2331-8422
DOI:10.48550/arxiv.1510.00206