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Looking inside three-dimensional (3D) silicon photonic band gap crystals

We have performed an x-ray holotomography study of a three-dimensional (3D) photonic band gap crystal. The crystals was made from silicon by CMOS-compatible methods. We manage to obtain the 3D material density throughout the fabricated crystal. We observe that the structural design is for most aspec...

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Bibliographic Details
Published in:arXiv.org 2016-09
Main Authors: Vos, W L, Grishina, D A, Cloetens, P, Harteveld, C A M, Pinkse, P W H
Format: Article
Language:English
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Summary:We have performed an x-ray holotomography study of a three-dimensional (3D) photonic band gap crystal. The crystals was made from silicon by CMOS-compatible methods. We manage to obtain the 3D material density throughout the fabricated crystal. We observe that the structural design is for most aspects well-realized by the fabricated nanostructure. One peculiar feature is a slight shear-distortion of the cubic crystal structure. We conclude that 3D X-ray tomography has great potential to solve many future questions on optical metamaterials.
ISSN:2331-8422